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- KISE Journal of Korean Institute of Surface Engineering
- Volume 36(5); 2003
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2003;36(5):357-363. Published online: Nov, 30, -0001
a-C:H Films Deposited in the Plasma of Surface Spark Discharge at Atmospheric Pressure. Part I: Experimental Investigation
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School of Materials Science and Engineering, ReMM, University of Ulsan;Institute of High Current Electronics SD RAS;Institute of High Current Electronics SD RAS;School of Materials Science and Engineering, ReMM, University of Ulsan;School of Materials Sci
초록
The aim of this work is the synthesis of a-C:H films from methane gas using surface spark discharge at the atmospheric pressure. Properties of these films have been investigated as functions of energy W delivered per a methane molecule in the discharge. T
키워드 a-C:H films;methane;atmospheric pressure;spark discharge;