Influence of Deposition Conditions on the Adhesion of Sputter-deposited MoS$_2$-Ti Films
Kim, Sun-Kyu;Yongliang Li;
Traditional Technology Innovation Research Laboratory School of Material Science and Engineering, University of Ulsan;Traditional Technology Innovation Research Laboratory School of Material Science and Engineering, University of Ulsan;
초록
MoS$_2$-Ti films were deposited on SKD-11 tool steel substrate by a D.C. magnetron sputtering system. The influence of deposition parameters on the adhesion of the films was investigated by the scratch test. Crosssection morphology was evaluate