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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 37(3); 2004
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2004;37(3):169-174. Published online: Nov, 30, -0001
유도결합 플라즈마 마그네트론 스퍼터링에 의한 MgO 박막의 특성 연구
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군산대학교 공과대학 재료화학공학부;군산대학교 공과대학 재료화학공학부;
초록
MgO thin films were reactively deposited using an internal inductively coupled plasma assisted sputtering method varying reactive gas ratio to get stoichiometric film composition, and bipolar dc substrate bias to suppress micro arcs. The minimum frequency
키워드 Plasma display panel;MgO;Inductively coupled plasma;Sputtering;