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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 37(4); 2004
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2004;37(4):220-225. Published online: Nov, 30, -0001
산화막 식각 기구 연구를 위한 QMF Ion Beam 장치의 제작
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군산대학교 재료공학과;
초록
A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources w
키워드 QMS;Inductively coupled plasma;Ion beam;Etch;