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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 38(1); 2005
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2005;38(1):7-13. Published online: Nov, 30, -0001
RF 마그네트론 스퍼터링을 이용한 Bismuth 박막의 제조와 그 전기적 특성 연구
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한국기계연구원 재료기술연구소 표면연구부;한국기계연구원 재료기술연구소 표면연구부;
초록
Bismuth thin films were prepared on glass substrate with RF magnetron sputtering and effects of substrate temperature on surface morphology and their electrical transport properties were investigated. Grain growth of bismuth after nucleation and the onset
키워드 Bismuth;Thermoelectric thin film;Sputtering;Hall effect measurement;