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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 38(2); 2005
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2005;38(2):73-78. Published online: Nov, 30, -0001
MgO 증착을 위한 유도결합 플라즈마 마그네트론 스퍼터링에서 실시간 공정 진단
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군산대학교 공과대학 재료 화학공학부;
초록
A real-time monitoring of ICP(inductively coupled plasma) assisted magnetron sputtering of MgO was carried out using a QMS(quadrupole mass spectrometer), an OES(optical emission spectrometer), and a digital oscilloscope with a high voltage probe and a cur
키워드 Plasma display panel;MgO;Inductively coupled plasma;Sputtering;