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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 38(6); 2005
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2005;38(6):207-211. Published online: Nov, 30, -0001
비대칭 스퍼터링에 의한 TiAIN/CrN 나노 다층 박막의 합성 및 특성 분석에 관한 연구
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한국항공대학교 항공재료공학과;한국항공대학교 항공재료공학과;한국항공대학교 항공재료공학과;
초록
In this work a multi-layered nanostructured TiAIN/CrN superlattice coatings was synthesized using closed-field unbalanced magnetron sputtering method and the relationships between their superlattice period (1), micro-structure, hardness and elastic modulu
키워드 TiAIN/CrN thin films;Superlattice;Nono-indentotion test;Oxidation;High temperature wear test;Unbalanced mognetron sputterings;