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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(3); 2006
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2006;39(3):98-104. Published online: Nov, 30, -0001
유도결합 플라즈마 스퍼터링을 이용한 플라스틱 기판 상의 Al이 도핑된 ZnO 박막 증착
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서울대학교 재료공학부;서울대학교 재료공학부;서울대학교 재료공학부;
초록
Al-doped ZnO (AZO) films were deposited on the plastic substrate by inductively coupled plasma (ICP) assisted DC magnetron sputtering. The AZO films were produced by sputtering a metallic target (Zn/Al) in a mixture of argon and oxygen gases. AZO films wi
키워드 Al-doped ZnO (AZO);Inductively coupled plasma (ICP);Reactive sputtering;Target voltage control;Plastic substrate;