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- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(3); 2006
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2006;39(3):105-109. Published online: Nov, 30, -0001
The Effects of Negative Carbon Ion Beam Energy on the Properties of DLC Film
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School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of U
초록
The effects of negative carbon ion beam energy on the bonding configuration, hardness and surface roughness of DLC film prepared by a direct metal ion beam deposition system were investigated. As the negative carbon ion beam energy increased from 25 to 15
키워드 Diamond-like carbon;Ion bombardment;Nanohardness;AFM;