Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 39(4); 2006
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2006;39(4):153-159. Published online: Nov, 30, -0001

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가스 유량제어에 의한 나노다이아몬드 박막의 특성연구

  • 김태규;김창훈;
    부산대학교 나노시스템공정공학과;한국부품소재산업진흥원 기술개발본부;
초록

Nanodiamond films were deposited on Si substrate by introducing a time dependent on/off modulation of $CH_4;and;O_2$ flows in a vertical-type microwave plasma enhanced chemical vapor deposition system. Surface morphology and diamond quality of

키워드 Nanodiamond;On/off modulation time;Nano particle;Cluster;