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KISE Journal of Korean Institute of Surface Engineering 2006;39(6):245-249. Published online: Nov, 30, -0001
In this study, ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on steel substrates(AISI D2) and Si wafers by a hybrid coating system of arc ion plating (AIP) using Ti target and d.c. magnetron sputtering technique using Mo and Si t
키워드 Ti-Mo-Si-N;Hybrid cooling system;Microstructure;Mechanical properties;