The Korean Society of Surface Science and Engineering

Pd-Cu alloy membrane for hydrogen separation was fabricated by sputtering and Cu reflow process. At first, the Pd and Cu was continuously deposited by sputtering method on oxidized Si support, the Cu reflow process was followed. Microstructure of the surf

키워드 Cu reflow;Oxidized Si support;Pd-Cu alloy hydrogen membrane;Sputtering deposition;Hydrogen separation;