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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 39(6); 2006
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2006;39(6):268-275. Published online: Nov, 30, -0001
복합표면처리된 CrZrN 박막의 밀착력에 미치는 스퍼터링 효과에 관한 연구
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플라즈마 응용 표면기술연구센터;플라즈마 응용 표면기술연구센터;플라즈마 응용 표면기술연구센터;
초록
In this study, effect of sputtering on the plasma-nitriding substrate and before PVD coating on the microstucture, microhardness, surface roughness and the adhesion strength of CrZrN thin films were investigated. Experimental results showed that this sput
키워드 Duplex surface treatment;Plasma nitriding;PVD coating;Adhesion strength;CrZrN thin film;