Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(2); 2007
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2007;40(2):59-62. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.2.059

Microstructure and Physical Properties of Sputtered Metal Containing Nanocrystalline Structured Carbon Coatings

  • Kim, Sung-I.;Han, Jeon-G.;
    Center for Advanced Plasma Surface Technology, SungKyunKwan University;Center for Advanced Plasma Surface Technology, SungKyunKwan University;
초록

Metal containing hydrogen free nanocrystalline structured carbon (Me:nc-C) films were synthesized by closed-field unbalanced magnetron sputtering system (CFUBM). The aim of this study was to determine the relationship between the microstructure and physic

키워드 Metal containing nanocrystalline structured carbon;Me:nc-C;