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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 40(2); 2007
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2007;40(2):91-97. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2007.40.2.091
입방정 질화붕소 박막의 잔류응력 형성에 미치는 산소 첨가 효과
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한국과학기술연구원 박막재료센터;한국과학기술연구원 박막재료센터;한국과학기술연구원 박막재료센터;한국과학기술연구원 박막재료센터;고려대학교 신소재공학과;한국과학기술연구원 박막재료센터;
초록
In this study we investigated the oxygen effect on the nucleation and its residual stress during unbalanced magnetron sputtering. Up to 0.5% in oxygen flow rate, cubic phase (c-BN) was dominated with extremely small fraction of Hexagonal phase (h-BN) of i
키워드 Cubic boron nitride;Oxygen addition;Residual stress;Nucleation;