Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(3); 2007
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2007;40(3):107-112. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.3.107

DC 마그네트론 스퍼터링에 의해 증착한 AZO 박막의 특성

  • 박이섭;이승호;송풍근;
    부산대학교 재료공학과;요업기술원;부산대학교 재료공학과;
초록

Aluminum doped zinc oxide (AZO) films were deposited on non-alkali glass substrate by DC magnetron sputtering with 3 types of AZO targets (doped with 1.0 wt%, 2.0 wt%, 3.0 wt% $Al_2O_3$). Electrical, optical properties and microstructure of AZO

키워드 Transparent conductive oxide;Ai doped ZnO;Electrical property;Microstructure;DC magnetron sputtering;