Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(3); 2007
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2007;40(3):117-124. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.3.117

RF/DC 동시인가 마그네트론 스퍼터링 방법으로 증착된 ITO 박막의 열처리 특성 연구

  • 문진욱;김동원;
    경기대학교 재료공학과;경기대학교 재료공학과;
초록

The ITO films were deposited on glass substrates by RF-superimposed dc reactive magnetron sputtering and were annealed in $N_2$ vacuum furnace with temperatures in the range of $403K{sim}573K$ for 30 minutes. Electrical, optical and

키워드 Indium tin oxide;RF-superimposed DC reactive magnetron sputtering;OLED;Resistvity;Mobility;Surface roughness;Transmittance;