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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 40(4); 2007
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2007;40(4):159-164. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2007.40.4.159
투명 폴리카보네이트 보호코팅을 위한 산화알루미늄 박막
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서울대학교 재료공학부;서울대학교 재료공학부;서울대학교 재료공학부;서울대학교 재료공학부;
초록
Transparent aluminum oxide films were deposited on polycarbonate (PC) substrates by inductively coupled plasma (ICP) assisted reactive sputtering. the oxygen flow rate was regulated by controlling the target voltage with a proportional integrate derivativ
키워드 Polycorbonote;ICP;Aluminum Oxide;Hard coating;Residual stress;