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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 40(4); 2007
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2007;40(4):165-169. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2007.40.4.165
실험계획법을 이용한 세슘보조 스퍼터링 공정의 특성분석
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가톨릭대학교 정보통신전자공학부;㈜소로나;㈜소로나;가톨릭대학교 정보통신전자공학부;
초록
Compared to conventional Indium Tin Oxide (ITO) film deposition methods, cesium (Cs) assisted sputtering offers higher film characteristics in terms of electrical, mechanical and optical properties. However, it showed highly non-linear characteristics bet
키워드 Design of Experiment[DOE];Cesium assisted sputtering;Indium tin oxide[ITO];Statistical analysis;