학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 40(5); 2007
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2007;40(5):203-208. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2007.40.5.203
비대칭 마크네트론 스퍼터링을 이용한 이리듐 산화물 박막의 합성과 전기 화학적 특성분석
-
고등기술연구원 플라즈마팀;고등기술연구원 플라즈마팀;;
초록
Preliminary studies were conducted to develop a dimensionally stable anode (DSA)electrode prepared by reactive sputtering method. The microstructure, surface morphology and electrochemical properties of iridium oxide
키워드 Unbalanced magnetron sputtering;DSA electrode;iridium oxide;Electrochemical properties;