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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 40(5); 2007
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2007;40(5):209-213. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2007.40.5.209
Al:ZnO의 펄스 스퍼터 증착에서 주파수에 따른 플라즈마의 특성과 기판 온도 변화
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군산대학교 신소재.나노화학 공학부;군산대학교 신소재.나노화학 공학부;
초록
Change of the plasma volume by pulse frequency in a bipolar pulsed DC unbalanced magnetron sputtering was investigated. As increasing the frequency at off duty 10% and at a constant power, the plasma volume was lengthened in vertical direction from the AZ
키워드 AZO;Bipolar pulsed DC;Plasma volume;UBM;