Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 40(6); 2007
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2007;40(6):258-261. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2007.40.6.258

어닐링처리시킨 SnO2 가스센서의 박막성장특성

  • 강계명;최종운;
    서울산업대 신소재공학과;서울산업대 신소재공학과;
초록

Relationships between the electrical resistivity and the growth characteristic of $SnO_2$ thin films were investigated. $SnO_2$ thin films with thickness from 64 nm to 91 nm were made by controlling the RF deposition energy from 80 t

키워드 Tin dioxide[$SnO_2$];Annealing;Electrical resistivity;Grain size;