학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(1); 2008
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2008;41(1):38-42. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.1.038
반도체 제조 설비용 전해 연마된 STS316L 용접강관의 표면 성질 - 전해 조건과 표면 성상의 관계를 중심으로 -
-
충북대학교 신소재공학과;발렉스코리아㈜;
초록
316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to see
키워드 316L stainless steel welding tube;Electro-polishing;XPS;AES;Surface roughness;Pipeline;Semiconductor production;Clean room;