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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(2); 2008
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2008;41(2):43-47. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.2.043
MPECVD법에 의한 초경인서트 공구의 c-BN 박막 증착
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부산대학교 나노정보소재공학과;부산대학교 나노시스템공정공학과;
초록
Cubic boron nitride(c-BN) films were deposited on tungsten carbide insert tool by microwave plasma enhanced chemical vapor deposition(MPECVD) from a gas mixture of triethyl borate
키워드 Insert Tool;c-BN Film;MPECVD(Microwave Plasma Enhanced Chemical Vapor Deposition);Thiethyl Borate;Adhesion;