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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(4); 2008
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2008;41(4):129-133. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.4.129
라디오파 마그네트론 스퍼터링으로 성장한 질소와 알루미늄 도핑된 ZnO 박막의 특성
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신라대학교 공과대학 전자재료공학과;신라대학교 공과대학 전자재료공학과;
초록
Nitrogen and aluminum codoped ZnO(NAZO) thin films were grown on glass substrates with changing the nitrogen flow ratio by radio-frequency magnetron sputtering. The structural, optical, and electrical properties of the NAZO films were investigated. The su
키워드 ZnO;RF magnetron sputtering;Nitrogen flow ratio;