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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(4); 2008
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2008;41(4):134-141. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.4.134
원격 유도결합 플라즈마 시스템의 특성 해석
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군산대학교 신소재.나노화학공학부 신소재공학;군산대학교 신소재.나노화학공학부 신소재공학;군산대학교 신소재.나노화학공학부 신소재공학;
초록
We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a va
키워드 Numerical modeling;Inductively coupled plasma;CFD-ACE;