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KISE Journal of Korean Institute of Surface Engineering 2008;41(5):199-204. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.5.199
Indium tin oxide (ITO) has been commonly used as an anode for organic light emitting diode (OLED), because of its relatively high work function, high transmittance, and low resistance. The ITO was mostly deposited by capacitive type DC or RF sputtering. I
키워드 Organic light emitting diode (OLED);Facing target sputtering (FTS);Indium-tin-oxide (ITO);Surface roughness;Microstructure;