학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(5); 2008
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2008;41(5):205-213. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.5.205
3차원 입자 모델을 이용한 마그네트론 스퍼터링 음극의 특성 분석
-
군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터;
초록
A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and
키워드 plasma;magnetron sputtering;particle simulation;