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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 41(6); 2008
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2008;41(6):274-278. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2008.41.6.274
펄스 마그네트론 스퍼터링 음극의 열전달 해석
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군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터;
초록
3-dimensional numerical analysis for a rectangular magnetron cathode model is done to predict cooling characteristics of high power sputtering system for ZnO deposition. It includes cooling channel design, heat transfer analysis of a target, bonding layer
키워드 Plasma;Magnetron sputtering;Heat transfer;Numerical analysis;