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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 42(1); 2009
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2009;42(1):1-7. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.1.001
표면처리된 흑연 보트를 이용한 알루미늄의 증발 특성
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포항산업과학연구원 설비자동화연구본부;포항산업과학연구원 설비자동화연구본부;
초록
Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited
키워드 Resistive heating source;Evaporation boat;Graphite boat;Aluminum film;Evaporation characteristics;Physical vapor deposition;