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KISE Journal of Korean Institute of Surface Engineering 2009;42(2):73-78. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.2.073
Quinary Ti-Al-Si-C-N films were successfully synthesized on SUS 304 substrates and Si wafers by a hybrid coating system combining an arc ion plating technique and a DC reactive magnetron sputtering technique. In this work, the effect of Si content on the
키워드 Ti-Al-Si-C-N;Hybrid coating system;Microstructure;Mechanical properties;