Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(3); 2009
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2009;42(3):128-132. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2009.42.3.128

ITO와 AZO 동시 증착법으로 제조된 투명전도막의 특성 연구

  • 김동호;김혜리;이성훈;변응선;이건환;
    재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;
초록

Transparent conducting thin films of indium tin oxide(ITO) co-sputtered with aluminum-doped zinc oxide(AZO) were deposited on glass substrate by dual magnetron sputtering. It was found that the electrical properties and structural characteristics of the f

키워드 Transparent conductive oxide;Indium tin oxide;Aluminum zinc oxide;Sputtering;Electrical transport properties;Transmittance;