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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 42(3); 2009
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2009;42(3):133-138. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.3.133
직류 방전과 펄스 직류 방전에 의한 플라즈마 형상 관찰
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군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터;군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터;
초록
Effects of bipolar pulse driving frequency between 50 kHz and 250 kHz on the discharge shapes were analyzed by measuring plasma characteristics by OES (Optical Emission Spectroscopy) and Langmuir probe. Plasma characteristics were modeled by a simple elec
키워드 Bipolar pulsed dc;Plasma shape;CCP;Plasma modeling;