Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(4); 2009
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2009;42(4):173-178. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2009.42.4.173

RF 스퍼터링과 이온소스 복합방식에 의한 플라스틱사출금형(SKD11)의 DLC막 응용

  • 김미선;홍성필;
    (주)케이디엘씨;(주)케이디엘씨;
초록

DLC film was synthesized on plastic injection mold(SKD11, $30;mm;{ imes};19;mm;{ imes};0.5;mm$) and Si(100) wafer for 2 h at $130^{circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analy

키워드 DLC;RF sputtering;Raman spectroscopy;Friction coefficient;Adhesion;