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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 42(4); 2009
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2009;42(4):179-185. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.4.179
Linear Ion Source를 이용한 Anode Voltage 변화에 따른 DLC 박막특성
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부산대학교 공과대학 재료공학부;한국생산기술연구원 동남권기술지원본부;한국생산기술연구원 동남권기술지원본부;(주)제이엔엘 테크;부산대학교 공과대학 재료공학부;
초록
Diamond-like carbon(DLC) films were deposited by linear ion source(LIS)-physical vapor deposition method changing the anode voltages from 800 V to 1800 V, and characteristics of the films were investigated using residual stress tester, nano-indentation, m
키워드 DLC;Linear ion source;PVD;Anode voltage;Hardness;