Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(5); 2009
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2009;42(5):216-219. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2009.42.5.216

ZnO/나노결정다이아몬드 적층 박막 SAW 필터

  • 정두영;강찬형;
    한국산업기술대학교 신소재공학과;한국산업기술대학교 신소재공학과;
초록

A surface acoustic wave (SAW) filter structure was fabricated employing $4{mu}m$ thick nanocrystalline diamond (NCD) and $2.2{mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by mic

키워드 SAW filter;ZnO;Nanocrystalline diamond;Microwave plasma CVD;