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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 42(6); 2009
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2009;42(6):267-271. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.6.267
동시 스퍼터링으로 제조한 AZO-ITO 혼합박막의 증착 중 수소 혼입 영향 분석
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재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;재료연구소 기능박막연구그룹;
초록
Multicomponent transparent conducting oxide films were deposited on glass substrates at 150 by dual magnetron sputtering of AZO and ITO targets. In the case of mixing a limited amount of ITO (10W), resistivity of TCO films was significantly increased comp
키워드 Transparent conducting oxide;Indium tin oxide;Aluminum zinc oxide;Hydrogen;Electrical transport properties;