Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 43(2); 2010
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2010;43(2):47-50. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2010.43.2.047

Two-step Electroless Plated Pt Ohmic Contacts to p-type InGaAs

  • Im, Hung-Su;Wang, Kai;Kim, Geun-Woo;Chang, Ji-Ho;Koo, Bon-Heun;
    School of Nano Advanced Materials Engineering, Changwon National University;School of Nano Advanced Materials Engineering, Changwon National University;School of Nano Advanced Materials Engineering, Changwon National University;Major of Semiconductor Phys
초록

This work discusses a two-step electroless plating method for preparing a Pt thin film on p-type InGaAs substrate, which is defined as Pt I and Pt II. A thin Pt catalytic layer formed in Pt I bath on the substrate at $65^{circ}C$. In the follow

키워드 Pt film;p-type InGaAs;CTLM;Ohmic contact;Two-step electroless plating;