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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 43(3); 2010
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2010;43(3):127-131. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2010.43.3.127
중간층을 이용한 DLC 박막의 밀착력에 관한 연구
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한국생산기술연구원;한국생산기술연구원;
초록
Adhesion of DLC film is very significant property that exhibits wear resistance, chemical inertness and high hardness when being deposited to metal substrate. This study was considered that change adhesion of DLC film produced by Plasma Enhanced Chemical
키워드 Diamond-like Carbon(a-C:H);Cr;Si-C:H;Adhesion;Residual stress;