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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 43(5); 2010
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2010;43(5):238-242. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2010.43.5.238
하이브리드 코팅시스템에 의한 Cr-Si-O-N 코팅막 합성 및 기계적 성질
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부산대학교 재료공학과;부산대학교 하이브리드 소재 솔루션 국가핵심연구센터;부산대학교 재료공학과;
초록
In the present work, the influence of oxide on the Cr-Si-N coatings was investigated for the Cr-Si-O-N coatings on AISI 304 and Si wafer deposited by hybrid system, which combines the DC magnetron sputtering technique and arc ion plating (AIP) using Cr an
키워드
Influence of oxide;Cr-Si-O-N;Hybrid system;Micro-hardness;