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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 43(6); 2010
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2010;43(6):309-314. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2010.43.6.309
반도체 표면처리공정용 대면적 히터 플레이트의 열전달 특성에 관한 연구
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대림대학 기계과;동은에이티에스;한국전자통신연구원;
초록
The numerical study for the effect of various factors that affect the temperature distribution of the process glass installed above the large rectangular heater plate was carried out. For the calculation, heat flux, distance between heat source and proces
키워드 Heater plate;Process glass;Heat flux;Isothermal heating wall;