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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 44(1); 2011
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2011;44(1):26-31. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2011.44.1.026
2D-ICP(inductively coupled plasma)에서 정전 탐침 삽입 시의 플라즈마 수치 계산
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군산대학교 공과대학 신소재공학과, 플라즈마 소재 응용 센터;
초록
Numerical modeling is used to investigate the perturbation of a single Langmuir probe (0.2 mm diameter shielded with 6 mm insulator) inserted along the center axis of a cylindrical inductively coupled plasma chamber filled with Ar at 10 mTorr and driven b
키워드 Electrostatic probe;Inductively coupled plasma;Numerical modeling;Plasma;Computational fluid dynamics;