Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 44(4); 2011
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2011;44(4):165-171. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2011.44.4.165

미세 전극 패턴을 갖는 알루미나 정전척을 이용한 LED용 사파이어 기판 흡착 연구

  • 김형주;신용건;안호갑;김동원;
    경기대학교 신소재공학과;경기대학교 신소재공학과;이지스코(주);경기대학교 신소재공학과;
초록

In this work, handling of sapphire substrate for LED by using an electrostatic chuck was studied. The electrostatic chuck consisted of alumina dielectric, which was doped with 1.2 wt% $TiO_2$. As the volume resistivity of alumina dielectric was

키워드 Electrostatic chuck;Electrostatic force;Dielectric;Sapphire substrate;Volume resistivity;Electrode pattern;