학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 44(5); 2011
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2011;44(5):179-184. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2011.44.5.179
DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 TiN 코팅막의 물성 비교연구
-
목포대학교 신소재공학과;
초록
This work investigated the effect of duty cycle and pulse frequency on the microstructures and properties of titanium nitride thin films deposited by asymmetric bipolar pulsed DC sputtering system. Oscilloscope traces of the I-V waveforms indicate high po
키워드 Duty cycle;Pulse frequency;Asymmetric bipolar;Pulsed sputtering;