Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 44(6); 2011
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2011;44(6):250-254. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2011.44.6.250

코스퍼터링법을 이용한 GaN LED 투명접촉전극용 NiO-AZO 박막의 제조 및 물성평가

  • 박희우;방준호;;송풍근;
    부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;
초록

NiO-AZO films were deposited on glass substrate by DC and RF magnetron co-sputtering system in pure $O_2$ gas without substrate heating during deposition. In order to control the chemical composition of the film, NiO target was supplied with co

키워드 NiO;AZO;Co-sputtering;Bond enthalpy;P-type conductivity;