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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 44(6); 2011
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2011;44(6):264-268. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2011.44.6.264
태양전지 CIGS용 Mo 후면전극의 전기 저항에 관한 연구
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한국생산기술연구원, 뿌리산업기술연구본부, 열.표면연구그룹;한국생산기술연구원, 뿌리산업기술연구본부, 열.표면연구그룹;
초록
The Molybedenium thin film is generally used on back contact material of CIGS solar cell due to low electrical resistivity and stable thermal expansion coefficient. The Mo thin films deposited on si wafer by the magnetron sputtering method. The research f
키워드 Mo films;CIGS;Sputtering;Electrical resistivity;Porosity;Oxidation;