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KISE Journal of Korean Institute of Surface Engineering 2011;44(6):269-276. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2011.44.6.269
Phase evolution and tribological behavior of Cr-Mo-N multi compositional films with different interlayer were investigated. The films were deposited by hybrid PVD (Physical Vapor Deposition) system consisted of dc unbalanced magnetron (UBM) sputtering and
키워드 Cr-Mo-N;Interlayer;Hybrid PVD;Tribology;Solid lubrication;