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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 45(3); 2012
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2012;45(3):123-129. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2012.45.3.123
DC 스퍼터법과 유도결합 플라즈마 마그네트론 스퍼터법으로 증착된 CrN 코팅막의 물성 비교연구
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목포대학교 신소재공학과;목포대학교 신소재공학과;
초록
Nanocrystalline CrN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 500 W, on coating microstructure, preferred orientation mechanical properties were
키워드 Inductively coupled plasma;ICP power;Grain size;Preferred orientation;Nanoindentation;