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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 45(4); 2012
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2012;45(4):174-180. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2012.45.4.174
사각형 유도 결합 플라즈마 시스템의 수치 모델링
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군산대학교 신소재공학과, 플라즈마 소재응용센터;
초록
Low pressure inductively coupled plasma characteristics of argon and oxygen are numerically simulated for a 400 mm rectangular type system with a plasma fluid model. The results showed lower power absorption profile at the corner than a circular one in a
키워드 Inductively coupled plasma;Numerical modeling;Sputtering;Bipolar plate;