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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 45(5); 2012
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2012;45(5):206-211. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2012.45.5.206
유도결합 플라즈마 스퍼터링 장치에서 MgO의 반응성 증착 시 공정 진단
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군산대학교 신소재공학과, 플라즈마 소재응용센터;
초록
Process analysis was carried out during deposition of MgO by inductively coupled plasma assisted reactive magnetron sputtering in Ar and
키워드 MgO;ICP;QMS;Reactive magnetron sputtering;